The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Sep. 28, 2020
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Krishanu Shome, Cheshire, CT (US);
Igor Matheus Petronella Aarts, Port Chester, NY (US);
Junwon Lee, Weston, CT (US);
Assignee:
ASML Holding N.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 9/00 (2006.01); G01J 9/02 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7046 (2013.01); G01J 9/02 (2013.01); G03F 9/7049 (2013.01); G03F 9/7088 (2013.01); G01J 2009/028 (2013.01);
Abstract
An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.