The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Dec. 27, 2018
Applicant:
Merck Patent Gmbh, Darmstadt, DE;
Inventors:
Naofumi Yoshida, Yokohama, JP;
Takashi Fuke, Kakegawa, JP;
Megumi Takahashi, Kakegawa, JP;
Katsuto Taniguchi, Kakegawa, JP;
Toshiaki Nonaka, Tokyo, JP;
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); C08G 77/00 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C08G 77/80 (2013.01); G03F 7/40 (2013.01);
Abstract
To provide a photosensitive siloxane composition capable of forming a pattern having a desired taper angle and a desired linewidth. [Means] The present invention provides a photosensitive siloxane composition comprising: a polysiloxane having a structure represented by the following formula (ia′): (L is an alkylene or phenylene), a photoactive agent, and a solvent.