The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Aug. 17, 2022
Kla Corporation, Milpitas, CA (US);
David W. Price, Austin, TX (US);
Robert J. Rathert, Mechanicsville, VA (US);
Chet V. Lenox, Lexington, TX (US);
Oreste Donzella, San Ramon, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Systems and methods for generating defect criticality are disclosed. Such systems and methods may include identifying defect results including a defect and a defect location. Such systems and methods may include receiving fault test recipes configured to test potential faults at a plurality of testing locations. Such systems and methods may include identifying a plurality of N-detect parameters based on a countable number of times the fault test recipes are configured to test a potential fault. Such systems and methods may include determining a plurality of weighting parameters based on the plurality of N-detect parameters. Such systems and methods may include generating the defect criticality for the defect based on a proximity between the plurality of testing locations and the defect location and the plurality of weighting.