The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2024
Filed:
Mar. 30, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Stefan Schulte, Stoedlen, DE;
Rolf Freimann, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A measurement apparatus () for interferometrically determining a surface shape of a test object (). A radiation source provides an input wave (), a multiply-encoded diffractive optical element (), which is configured to produce by diffraction from the input wave a test wave () that is directed at the test object and has a wavefront in the form of a free-form surface and at least one calibration wave (), and a capture device (). The calibration wave has a wavefront with a non-rotationally symmetric shape (), wherein cross sections through the wavefront of the calibration wave along cross-sectional surfaces each aligned transversely to one another have a curved shape. The curved shapes in the different cross-sectional surfaces differ in terms of an opening parameter. The capture device () captures a calibration interferogram formed by superimposing a reference wave () with the calibration wave after interaction with a calibration object ().