The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2024

Filed:

Apr. 11, 2023
Applicant:

Zhejiang Lab, Hangzhou, CN;

Inventors:

Shunbin Li, Hangzhou, CN;

Weihao Wang, Hangzhou, CN;

Ruyun Zhang, Hangzhou, CN;

Qinrang Liu, Hangzhou, CN;

Zhiquan Wan, Hangzhou, CN;

Jianliang Shen, Hangzhou, CN;

Assignee:

ZHEJIANG LAB, Hangzhou, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 25/065 (2023.01); H01L 23/498 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 25/0655 (2013.01); H01L 21/30625 (2013.01); H01L 21/486 (2013.01); H01L 21/565 (2013.01); H01L 23/49822 (2013.01); H01L 23/49827 (2013.01); H01L 23/49838 (2013.01); H01L 23/5383 (2013.01); H01L 24/16 (2013.01); H01L 24/81 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/81192 (2013.01); H01L 2924/182 (2013.01);
Abstract

A wafer-level heterogeneous dies integration structure and method are provided. The integration structure includes a wafer substrate, a silicon interposer, heterogeneous dies, and a configuration substrate. A standard integration module is defined by the heterogeneous dies connected to the silicon interposer. The standard integration module is connected to an upper surface of the wafer substrate, and the configuration substrate is connected to a lower surface of the wafer substrate. The wafer substrate is connected to the configuration substrate via Through Silicon Vias on lower surface of the wafer substrate. And the upper surface of the wafer substrate is provided with Re-distributed Layers and a standardized micro bump array to form standard integration zone connected to the standard integration module.


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