The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Nov. 29, 2018
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Emad Aqad, Marlborough, MA (US);
James F. Cameron, Marlborough, MA (US);
James W. Thackeray, Marlborough, MA (US);
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01); G03F 7/039 (2006.01); C07C 309/10 (2006.01); C07C 309/19 (2006.01); C07C 62/06 (2006.01); C07C 309/12 (2006.01); C07C 395/00 (2006.01); C07D 517/00 (2006.01); C07C 309/06 (2006.01); C07C 309/16 (2006.01); C07D 345/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 62/06 (2013.01); C07C 309/06 (2013.01); C07C 309/10 (2013.01); C07C 309/12 (2013.01); C07C 309/16 (2013.01); C07C 309/19 (2013.01); C07C 395/00 (2013.01); C07D 345/00 (2013.01); C07D 517/00 (2013.01); G03F 7/0042 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/16 (2013.01); G03F 7/2004 (2013.01); G03F 7/26 (2013.01); C07C 2603/74 (2017.05);
Abstract
New Te-salt compounds, including photoactive tellurium compounds useful for Extreme Ultraviolet Lithography.