The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2024

Filed:

Aug. 09, 2021
Applicant:

Mitutoyo Corporation, Kawasaki, JP;

Inventors:

Shinji Komatsuzaki, Mito, JP;

Yoshimasa Suzuki, Tsukuba, JP;

Tomotaka Takahashi, Tsukuba, JP;

Assignee:

Mitutoyo Corporation, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 3/08 (2006.01); G01S 17/34 (2020.01); G01S 7/4912 (2020.01); G01S 7/481 (2006.01);
U.S. Cl.
CPC ...
G01S 17/34 (2020.01); G01S 7/4917 (2013.01); G01S 7/4818 (2013.01);
Abstract

A measurement apparatus including: a laser that outputs a frequency-modulated laser beam; a branch that splits the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a frequency analyzer that frequency-analyzes the beat signal; a storage that stores a reference frequency signal which is a frequency signal obtained by converting a reference signal output by the beat signal generator in a state without the object to be measured; and calculation circuitry that calculates a difference between propagation distances of the reference light and the measurement light.


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