The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Aug. 12, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Jochen Hetzler, Aalen, DE;
Holger Jennewein, Oberkochen, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 11/24 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2441 (2013.01); G03F 7/70591 (2013.01);
Abstract
A device and a method for characterizing the surface shape of a test object. The device for characterizing the surface shape of a test object has a test arrangement () for determining the surface shape of a test object () using a test wave. The test wave has a wavefront generated by diffraction at a diffractive optical element. The device additionally has a first vacuum chamber () and a second vacuum chamber (), wherein the second vacuum chamber () has a magazine for mounting at least two diffractive optical elements ().