The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Jun. 05, 2023
Applicant:

Zhejiang Lab, Zhejiang, CN;

Inventors:

Weihao Wang, Hangzhou, CN;

Shunbin Li, Hangzhou, CN;

Guandong Liu, Hangzhou, CN;

Ruyun Zhang, Hangzhou, CN;

Qinrang Liu, Hangzhou, CN;

Zhiquan Wan, Hangzhou, CN;

Jianliang Shen, Hangzhou, CN;

Assignee:

ZHEJIANG LAB, Hangzhou, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 23/538 (2006.01);
U.S. Cl.
CPC ...
H01L 24/81 (2013.01); H01L 23/538 (2013.01); H01L 23/5381 (2013.01); H01L 23/5382 (2013.01); H01L 23/5389 (2013.01); H01L 24/11 (2013.01); H01L 24/14 (2013.01); H01L 2224/11462 (2013.01); H01L 2224/1403 (2013.01); H01L 2224/145 (2013.01); H01L 2224/14131 (2013.01);
Abstract

A system-on-wafer structure and a fabrication method. The structure includes a wafer substrate, an integrated chiplet, a system configuration board and a thermal module. The wafer substrate and the integrated chiplet are bonded through a wafer micro bump array and a chiplet micro bump array. The wafer substrate and the system configuration board are bonded through a copper pillar array on wafer substrate topside and a pad on system configuration board backside. A molding layer is provided between the wafer substrate and the system configuration board, and is configured to mold the wafer substrate, the integrated chiplet and the copper pillar array. Integrated chiplet are electrically connected to each other through a re-distributed layer in wafer substrate. The integrated chiplet is electrically connected to the system configuration board through the re-distributed layer and the copper pillar array. The thermal module is attached to the backside of the wafer substrate.


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