The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Jun. 15, 2021
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Masahiko Takimoto, Osaka, JP;

Toshihide Yoshida, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Kouji Nishino, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 31/02 (2006.01); G05D 7/06 (2006.01); H01L 21/67 (2006.01); F16K 37/00 (2006.01);
U.S. Cl.
CPC ...
F16K 31/02 (2013.01); G05D 7/0623 (2013.01); G05D 7/0635 (2013.01); F16K 37/00 (2013.01); F16K 37/005 (2013.01); G05D 7/0652 (2013.01); H01L 21/67017 (2013.01);
Abstract

A fluid control devicecomprises a valve device Vincluding actuatorsandfor opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V, and a control circuitconnected to the valve device Vand the pressure sensor PT, and the control circuitcontrols an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.


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