The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 09, 2024

Filed:

May. 28, 2020
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Matthew A Fuller, Colorado Springs, CO (US);

Mark V. Smith, Colorado Springs, CO (US);

Jeffery J. King, Colorado Springs, CO (US);

John Burns, Colorado Springs, CO (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D 85/30 (2006.01); H01L 21/673 (2006.01); F16K 15/14 (2006.01); F16K 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); F16K 15/148 (2013.01); F16K 27/0209 (2013.01); H01L 21/6732 (2013.01); H01L 21/67379 (2013.01);
Abstract

A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure. The substrate container additionally includes a check-valve assembly, the check-valve assembly being retained with respect to the access structure to provide fluid communication with an interior of the substrate container. The check-valve assembly includes a grommet, the grommet being formed of an elastomeric material. A valve seat is disposed within the grommet, the valve seat being integrally formed with the grommet according to one aspect, and being formed of a separate piece according to another aspect. An elastomeric valve member, specifically an elastomeric umbrella valve member according to one aspect, is disposed within the grommet and held to engage the valve seat, thereby restricting fluid flow through the check-valve assembly with respect to the interior of the substrate container.


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