The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Jul. 06, 2020
Mitutoyo Corporation, Kawasaki, JP;
Yoshimasa Suzuki, Tsukuba, JP;
Shinichi Hara, Tsukuba, JP;
Shinji Komatsuzaki, Mito, JP;
Ryusuke Kato, Tsukuba, JP;
Hiroki Ujihara, Tsukuba, JP;
Masayuki Nara, Tsukuba, JP;
Tomotaka Takahashi, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A measurement apparatus includes a laser apparatus, a branching part that branches a frequency-modulated laser beam output by the laser apparatus into a reference light and a measurement light; a beat signal generation part that generates a beat signal by mixing a reflected light and the reference light, a conversion part that converts the beat signal into a digital signal at a first sampling rate and frequency-analyses it, an extraction part that extracts a signal component corresponding to a cavity frequency from the frequency-modulated laser beam, a digital filter that digitally filters the extracted signal component at a second sampling rate; and a calculation part that calculates a difference in a propagation distance between the reference light and the measurement light.