The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Jan. 20, 2022
Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventors:

Mengmeng Yang, Hefei, CN;

Jie Bai, Hefei, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/768 (2006.01); H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H10B 12/09 (2023.02); H01L 21/76865 (2013.01); H01L 21/76883 (2013.01); H10B 12/485 (2023.02);
Abstract

A method for manufacturing a semiconductor structure and a semiconductor structure are provided. The method includes the following operations. A substrate is provided, includes a core region and a peripheral region. A preset barrier layer is formed on the substrate, and covers the core region and the peripheral region. At least a part of the preset barrier layer corresponding to the peripheral region is removed to expose a part of the substrate, and to take a reserved part of the preset barrier layer as a first barrier layer. A dielectric layer and a first conductive layer are successively formed on the first barrier layer and the substrate. A part of the dielectric layer and the first conductive layer on the first barrier layer are removed, to reserve a part of the dielectric layer and the first conductive layer on the first barrier layer closer to the peripheral region.


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