The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Oct. 26, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Takashi Ando, Eastchester, NY (US);

Ruilong Xie, Niskayuna, NY (US);

Pouya Hashemi, Purchase, NY (US);

Alexander Reznicek, Troy, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1033 (2013.01); H01L 29/0607 (2013.01); H01L 29/42372 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01);
Abstract

The embodiments herein describe a vertical field effect transistor (FET) with a gate that includes different work function metals (WFMs). Each WFM can be made up of one material (or one layer) or multiple materials forming multiple layers. In any case, the gate includes at least two different WFMs. For example, a first WFM may have a different material or layer than a second WFM in the gate, or one layer of the first WFM may have a different thickness than a corresponding layer in the second WFM. Having different WFMs in the gate can reduce the gate induced drain leakage (GIDL) in the FET.


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