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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11854846 B1

PDFFull Text
Date of Patent:
Dec. 26, 2023

Filed:

Jun. 29, 2022

System for a semiconductor fabrication facility and method for operating the same

Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Fu-Hsien Li, Taichung, TW;

Sheng-Kang Yu, Hsinchu, TW;

Chi-Feng Tung, Miaoli County, TW;

Hsiang Yin Shen, Hsinchu, TW;

Guancyun Li, Miaoli County, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;

Attorneys:

WPAT LAW

Anthony King

Primary Examiner:

Jigneshkumar C Patel

Int. Cl.
CPC ...
G05B 19/19 (2006.01); G05B 19/4061 (2006.01); H01L 21/67 (2006.01); B66C 17/26 (2006.01); B66C 15/00 (2006.01); B66C 13/16 (2006.01); B66C 13/18 (2006.01); H01L 21/677 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67265 (2013.01); B66C 13/16 (2013.01); B66C 13/18 (2013.01); B66C 15/00 (2013.01); B66C 17/26 (2013.01); G03F 7/70033 (2013.01); G03F 7/7075 (2013.01); G03F 7/7085 (2013.01); G03F 7/70533 (2013.01); G03F 7/70741 (2013.01); G03F 7/70975 (2013.01); G03F 7/70991 (2013.01); G05B 19/19 (2013.01); G05B 19/4061 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/67721 (2013.01); H01L 21/67724 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); G05B 2219/40292 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.

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