The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Dec. 18, 2018
Applicant:
National Center for Advanced Packaging Co., Ltd., Jiangsu, CN;
Inventors:
Daping Yao, Jiangsu, CN;
Liqiang Cao, Jiangsu, CN;
Assignee:
NATIONAL CENTER FOR ADVANCED PACKAGING CO., LTD., Jiangsu, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B05B 7/16 (2006.01); B08B 3/08 (2006.01); B08B 3/10 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02063 (2013.01); B05B 7/1613 (2013.01); B08B 3/08 (2013.01); B08B 3/10 (2013.01); H01L 21/0229 (2013.01); H01L 21/02164 (2013.01); H01L 21/76898 (2013.01); B08B 2203/007 (2013.01);
Abstract
A method for cleaning a through via including the following steps is provided: heating a cleaning fluid to a predetermined temperature; mixing the cleaning liquid with an inert gas and entering into a cleaning cavity; atomizing the cleaning liquid in an atomizer to spray on a wafer surface and to wet an inner wall and a bottom of the through via; and closing a cleaning liquid valve.