The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Feb. 23, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Anhthu Ngo, San Jose, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Balasubramanian Ramachandran, Cupertino, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Edric Tong, Sunnyvale, CA (US);
Anzhong Chang, San Jose, CA (US);
Kin Pong Lo, Fremont, CA (US);
Kartik Shah, Saratoga, CA (US);
Schubert S. Chu, San Francisco, CA (US);
Zhepeng Cong, San Jose, CA (US);
James Francis Mack, Woodside, CA (US);
Nyi O. Myo, San Jose, CA (US);
Kevin Joseph Bautista, San Jose, CA (US);
Xuebin Li, Sunnyvale, CA (US);
Yi-Chiau Huang, Fremont, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one embodiment, a susceptor for thermal processing is provided. The susceptor includes an outer rim surrounding and coupled to an inner dish, the outer rim having an inner edge and an outer edge. The susceptor further includes one or more structures for reducing a contacting surface area between a substrate and the susceptor when the substrate is supported by the susceptor. At least one of the one or more structures is coupled to the inner dish proximate the inner edge of the outer rim.