The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Dec. 23, 2020
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Takayuki Waseda, Toyama, JP;
Takashi Nakagawa, Toyama, JP;
Kimihiko Nakatani, Toyama, JP;
Motomu Degai, Toyama, JP;
Takao Izaki, Toyama, JP;
Yoshitomo Hashimoto, Toyama, JP;
Assignee:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); H01L 21/02 (2006.01); C23C 16/52 (2006.01); C23C 16/40 (2006.01); C23C 16/32 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02312 (2013.01); C23C 16/04 (2013.01); C23C 16/325 (2013.01); C23C 16/401 (2013.01); C23C 16/45534 (2013.01); C23C 16/45544 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); H01L 21/0228 (2013.01); H01L 21/02126 (2013.01); H01L 21/02304 (2013.01); H01L 21/02359 (2013.01);
Abstract
A technique includes: (a) modifying a surface of a first base exposed on a surface of a substrate to be terminated with a hydrocarbon group by supplying a hydrocarbon group-containing gas to the substrate having the first base and a second base exposed on the surface of the substrate; and (b) forming a film on a surface of the second base by supplying an oxygen- and hydrogen-containing gas to the substrate after modifying the surface of the first base.