The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Feb. 08, 2022
Ebara Corporation, Tokyo, JP;
Masaya Seki, Tokyo, JP;
Shao Hua Chang, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Provided is a technique that allows suppressing a liquid splash of a plating solution. A plating apparatus includes a plating tankincluding an inner tank, a substrate holder, and a paddleconfigured to agitate the plating solution accumulated in the inner tankby reciprocating in a horizontal direction. The paddleis arranged to be inserted through a hole provided in an outer peripheral wall of the inner tank and to build a bridge between an inside of the inner tank and an outside of the inner tank, and the paddleincludes a first portionconfigured to agitate the plating solution accumulated in the inner tank, a second portionarranged outside the inner tank and disposed above the first portion, and a connecting portionarranged outside the inner tank to connect the first portion to the second portion.