The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Nov. 25, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Daniela White, Ridgefield, CT (US);
Donald Frye, Sherman, CT (US);
Elizabeth Thomas, New Milford, CT (US);
Jun Liu, Newtown, CT (US);
Michael White, Ridgefield, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01); C11D 7/34 (2006.01); B08B 3/08 (2006.01); C11D 7/06 (2006.01); H01L 21/02 (2006.01); C11D 7/26 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3218 (2013.01); B08B 3/08 (2013.01); C09K 13/00 (2013.01); C11D 7/06 (2013.01); C11D 7/265 (2013.01); C11D 7/34 (2013.01); C11D 11/0047 (2013.01); H01L 21/02057 (2013.01); H01L 21/02074 (2013.01);
Abstract
A cleaning composition is disclosed for cleaning residue and/or contaminants from microelectronic devices having same thereon. The composition comprises at least one complexing agent, at least one cleaning additive, at least one pH adjusting agent, water, and at least one oxylamine compound. Advantageously, the compositions show effective cleaning of cobalt-containing substrates and improved cobalt compatibility.