The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Feb. 28, 2022
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Assignee:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 1/08 (2006.01); C23C 16/458 (2006.01); H01L 21/677 (2006.01); G01N 29/14 (2006.01); G01M 99/00 (2011.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 29/14 (2013.01); C23C 16/4583 (2013.01); G01M 99/005 (2013.01); H01L 21/67739 (2013.01); H04R 1/08 (2013.01); H01L 21/67259 (2013.01); H01L 21/67793 (2013.01);
Abstract
There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to be capable of transporting the substrate and comparing a waveform of sound data with a preset threshold value to detect an abnormality of the transfer; and failure detecting by picking up vibration of the transfer and comparing a waveform of vibration data with a preset threshold value to detect a failure of the transfer.