The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2023

Filed:

Jun. 29, 2021
Applicant:

Sandisk Technologies Llc, Addison, TX (US);

Inventors:

Mitsuhiro Togo, Yokkaichi, JP;

Hiroshi Nakatsuji, Yokkaichi, JP;

Assignee:

SANDISK TECHNOLOGIES LLC, Addison, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/417 (2006.01); H01L 29/40 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41775 (2013.01); H01L 21/76816 (2013.01); H01L 23/5283 (2013.01); H01L 29/401 (2013.01); H01L 29/7833 (2013.01);
Abstract

A transistor includes a semiconductor substrate including a first active region, a second active region, and a semiconductor channel, a gate stack structure that overlies the semiconductor channel, a proximal dielectric material layer overlying the semiconductor substrate, laterally surrounding the gate stack structure, a distal dielectric material layer overlying the proximal dielectric material layer, and a first contact via structure contacting the first active region having a greater lateral extent at a level of the proximal dielectric material layer than at a level of the distal dielectric material layer.


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