The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Apr. 16, 2021
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Yu-Ching Lee, Kaohsiung, TW;
Yu-Piao Fang, Tainan, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); G03F 7/00 (2006.01); G03F 1/22 (2012.01); H01L 21/673 (2006.01); G03F 1/66 (2012.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); G03F 1/22 (2013.01); G03F 1/66 (2013.01); G03F 7/7015 (2013.01); G03F 7/70741 (2013.01); H01L 21/67353 (2013.01); H01L 21/67359 (2013.01); H01L 21/67373 (2013.01); H01L 21/67379 (2013.01); H01L 21/67383 (2013.01); H01L 21/67386 (2013.01); H01L 21/67733 (2013.01); H01L 21/67769 (2013.01); H01L 21/67772 (2013.01); H01L 21/67721 (2013.01); H01L 21/67724 (2013.01);
Abstract
A transportation container is provided with a container body constructed of a top wall, a bottom wall, a rear wall, and two sidewalls forming a front opening for loading or unloading a reticle pod into or out of the container body; a lid for opening and closing the front opening; and a lift plate above the container body configured to connect to a carrier of an overhead hoist transfer (OHT) system.