The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
May. 19, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Tomoatsu Ishibashi, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 1/00 (2006.01); B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 1/006 (2013.01); B08B 3/024 (2013.01); H01L 21/67046 (2013.01);
Abstract
A substrate washing device includes a roll washing member, a single tube nozzle and spray nozzle. The roll washing member linearly extends over the entire length of the diameter of the substrate and comes into slide-contact with the surface of the substrate. The single tube nozzle discharges washing liquid onto a roll winding side of the roll washing member so that the first washing liquid lands in the front center of the substrate. The spray nozzle sprays a second washing liquid in a fan shape toward a second area when the roll winding side area is divided into two areas.