The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Jan. 17, 2022
Globalfoundries U.s. Inc., Malta, NY (US);
Ian Melville, Highland, NY (US);
Nicholas Polomoff, Hopewell Junction, NY (US);
Thomas Houghton, Marlboro, NY (US);
Koushik Ramachandran, Wappingers Falls, NY (US);
Pallabi Das, Bangalore, IN;
GlobalFoundries U.S. Inc., Malta, NY (US);
Abstract
Structures for a cavity included in a photonics chip and methods of fabricating a structure for a cavity included in a photonics chip. The structure includes a substrate, a back-end-of-line stack having interlayer dielectric layers on the substrate, and a cavity penetrating through the back-end-of-line stack and into the substrate. The cavity includes first sidewalls and second sidewalls, and the second sidewalls have an alternating arrangement with the first sidewalls to define non-right-angle corners.