The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2023

Filed:

Jul. 27, 2020
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Karl Heinz Priewasser, Munich, DE;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/268 (2006.01); H01L 21/304 (2006.01); H01L 21/78 (2006.01); H01L 21/66 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); H01L 21/268 (2013.01); H01L 21/304 (2013.01); H01L 21/78 (2013.01); H01L 22/20 (2013.01); H01L 23/544 (2013.01); H01L 2221/68327 (2013.01); H01L 2223/5446 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A substrate having a first side and a second side opposite the first side is processed by providing a protective film having a front surface and a back surface opposite the front surface and providing a holding frame for holding the substrate. The holding frame has a central opening. The holding frame is attached to the back surface of the protective film so as to close the central opening of the holding frame by the protective film, and the first side of the substrate or the second side of the substrate is attached to the front surface of the protective film. The substrate is processed from the side of the substrate which is opposite the side of the substrate attached to the front surface of the protective film, and/or the side of the substrate which is attached to the front surface of the protective film.


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