The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Dec. 29, 2021
Method and apparatus for usable beam current and brightness in schottky thermal field emission (tfe)
Nuflare Technology, Inc., Kanagawa, JP;
Nuflare Technology America, Inc., Sunnyvale, CA (US);
Victor Katsap, Hopewell Junction, NY (US);
Chising Lai, Hopewell Junction, NY (US);
NuFlare Technology, Inc., Kanagawa, JP;
NuFlare Technology America, Inc., Sunnyvale, CA (US);
Abstract
The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.