The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2023
Filed:
Dec. 22, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Marco Jan-Jaco Wieland, Delft, NL;
Albertus Victor Gerardus Mangnus, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2251 (2018.01); G01N 23/203 (2006.01); H01J 37/10 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01N 23/203 (2013.01); H01J 37/10 (2013.01); H01J 37/244 (2013.01);
Abstract
The embodiments of the present disclosure provide various techniques for detecting backscatter charged particles, including accelerating charged particle sub-beams along sub-beam paths to a sample, repelling secondary charged particles from detector arrays, and providing devices and detectors which can switch between modes for primarily detecting charged particles and modes for primarily detecting secondary particles.