The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2023

Filed:

Apr. 15, 2021
Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Sheng Liu, Bow, NH (US);

James F. Cameron, Brookline, MA (US);

Iou-Sheng Ke, Andover, MA (US);

Shintaro Yamada, Shrewsbury, MA (US);

Li Cui, Westborough, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); C09D 163/00 (2006.01); C08G 59/62 (2006.01); C09D 7/63 (2018.01); C07C 33/28 (2006.01); C07C 43/205 (2006.01); C07C 69/76 (2006.01); C09D 7/20 (2018.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); G03F 7/075 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); G03F 7/004 (2006.01); G03F 1/56 (2012.01); G03F 7/025 (2006.01); G03F 7/16 (2006.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0276 (2013.01); C09D 163/00 (2013.01); G03F 7/0035 (2013.01); G03F 7/075 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01);
Abstract

Coating compositions comprise: a B-staged reaction product of one or more compounds comprising: a core chosen from Ccarbocyclic aromatic, Cheterocyclic aromatic, Caliphatic, Cheteroaliphatic, Ccycloaliphatic, and Cheterocycloaliphatic, each of which may be substituted or unsubstituted; and two or more substituents of formula (1) attached to the core: wherein: Aris an aromatic group independently chosen from Ccarbocyclic aromatic and Cheteroaromatic, each of which may be substituted or unsubstituted; Z is a substituent independently chosen from OR, protected hydroxyl, carboxyl, protected carboxyl, SR, protected thiol, —O—C(═O)—Calkyl, halogen, and NHR; wherein each Ris independently chosen from H, Calkyl, Cunsaturated hydrocarbyl, and Caryl; each Ris independently chosen from H, Calkyl, Cunsaturated hydrocarbyl, Caryl, C(═O)—R, and S(═O)—R; x is an integer from 1 to the total number of available aromatic ring atoms in Ar; and * denotes the point of attachment to the core; provided that when the core comprises an aromatic ring, no substituents of formula (1) are in an ortho position to each other on the same aromatic ring of the core; and one or more solvents, wherein the total solvent content is from 50 to 99 wt % based on the coating composition. Coated substrates formed with the coating compositions and methods of forming electronic devices using the compositions are also provided. The compositions, coated substrates and methods find particular applicability in the manufacture of semiconductor devices.


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