The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Dec. 30, 2020
Applicant:
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Inventors:
John Breuer, Munich, DE;
Christian Droese, Munich, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/1472 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/24564 (2013.01);
Abstract
It is provided a current measurement modulefor measuring a current of a primary charged particle beamof a charged particle beam device, the current measurement moduleincluding a detection unitconfigured for detecting secondary and/or backscattered charged particlesreleased on impingement of the primary charged particle beamon a conductive surfaceof a beam dumpof the charged particle beam device.