The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Aug. 16, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss X-ray Microscopy Inc., Dublin, CA (US);
Johannes Ruoff, Aalen, DE;
Juan Atkinson Mora, Hillsboro, OR (US);
Thomas Anthony Case, Walnut Creek, CA (US);
Heiko Feldmann, Aalen, DE;
Christoph Hilmar Graf Vom Hagen, Oakland, CA (US);
Thomas Matthew Gregorich, Milpitas, CA (US);
Gerhard Krampert, Pleasanton, CA (US);
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss X-ray Microscopy Inc., Dublin, CA (US);
Abstract
A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.