The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Apr. 06, 2021
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Jun Hatakeyama, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/038 (2006.01); C08F 220/24 (2006.01); C08F 220/30 (2006.01); C08F 220/28 (2006.01); C08F 212/14 (2006.01); C08F 220/22 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C08F 212/24 (2020.02); C08F 220/22 (2013.01); C08F 220/24 (2013.01); C08F 220/281 (2020.02); C08F 220/282 (2020.02); C08F 220/303 (2020.02); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01);
Abstract
An iodized aromatic carboxylic acid type pendant-containing polymer is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging, pattern collapse or residue formation, independent of whether it is of positive or negative tone.