The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Aug. 31, 2021
Fei Company, Hillsboro, OR (US);
Oleksii Kaplenko, Brno, CZ;
Ond{hacek over (r)}ej Machek, Brno, CZ;
Tomá{hacek over (s)} Vystav{hacek over (e)}l, Brno, CZ;
Jan Klusá{hacek over (c)}ek, Brno, CZ;
Kristýna Bukvi{hacek over (s)}ová, Brno, CZ;
Mykola Kaplenko, Brno, CZ;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to a method of, and apparatus for, examining a sample using a charged particle beam apparatus. The method as defined herein comprises the step of detecting, using a first detector, emissions of a first type from the sample in response to the charged particle beam illuminating the sample. The method further comprises the step of acquiring spectral information on emissions of a second type from the sample in response to the charged particle beam illuminating the sample. As defined herein, said step of acquiring spectral information comprises the steps of providing a spectral information prediction algorithm and using said algorithm for predicting said spectral information based on detected emissions of the first type as an input parameter of said algorithm. With this it is possible to gather EDS data using only a BSE detector.