The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2023
Filed:
Sep. 02, 2020
Applicant:
Applied Materials Israel, Ltd., Revohot, IL;
Inventors:
Haim Feldman, Nof-Ayalon, IL;
Eyal Neistein, Herzlyia, IL;
Harel Ilan, Rehovot, IL;
Shahar Arad, Holon, IL;
Ido Almog, Rehovot, IL;
Ori Golani, Ramat-Gan, IL;
Assignee:
Applied Materials Israel, Ltd., Revohot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2022.01); G01N 21/95 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G06T 7/001 (2013.01); G06T 7/0008 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.