The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2023

Filed:

Jun. 25, 2019
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Seung Hoon Sung, Portland, OR (US);

Charles C. Kuo, Hillsboro, OR (US);

Abhishek A. Sharma, Hillsboro, OR (US);

Van H. Le, Beaverton, OR (US);

Jack Kavalieros, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 12/00 (2023.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H10B 12/05 (2023.02); H01L 29/42392 (2013.01); H01L 29/66742 (2013.01); H01L 29/78642 (2013.01); H01L 29/78696 (2013.01); H10B 12/036 (2023.02); H10B 12/33 (2023.02); H10B 12/482 (2023.02);
Abstract

An integrated circuit includes one or more layers of insulating material defining a vertical bore with a first portion and a second portion. A capacitor structure is in the first portion of the vertical bore and includes a first electrode, a second electrode, and a dielectric between the first electrode and the second electrode. A transistor structure is in the second portion of the vertical bore and includes a third electrode extending into the second portion of the vertical bore, a layer of semiconductor material in contact with the first electrode and in contact with the second electrode, and a dielectric between the semiconductor material and the insulating material. A fourth electrode wraps around the transistor structure such that the dielectric is between the semiconductor material and the fourth electrode. The capacitor structure can be above or below the transistor structure in a self-aligned vertical arrangement.


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