The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2023
Filed:
Sep. 25, 2018
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/02 (2006.01); G02B 9/00 (2006.01); G02B 13/18 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); G09B 9/10 (2006.01); G01N 23/2251 (2018.01);
U.S. Cl.
CPC ...
G02B 21/02 (2013.01); G02B 9/00 (2013.01); G02B 13/18 (2013.01); G09B 9/10 (2013.01); H01J 37/226 (2013.01); H01J 37/28 (2013.01); G01N 23/2251 (2013.01); H01J 2237/26 (2013.01); H01J 2237/2802 (2013.01);
Abstract
An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.