The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2023
Filed:
Dec. 08, 2020
Asml Holding N.v., Veldhoven, NL;
Asml Netherlands B.v., Veldhoven, NL;
Michal Emanuel Pawlowski, Norwalk, CT (US);
Aage Bendiksen, Fairfield, CT (US);
Ryan Alan Munden, Trumbull, CT (US);
Han-Kwang Nienhuys, Utrecht, NL;
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system () includes an illumination system (), a detector (), and a comparator (). The illumination system includes a radiation source () and a spatial light modulator (). The radiation source generates a beam of radiation (). The spatial light modulator directs the beam toward a surface () of an object () and adjusts a spatial intensity distribution of the beam at the surface. The detector receives radiation () scattered at the surface and by a structure () near the surface. The detector generates a detection signal based on the received radiation. The comparator receives the detection signal, generates a first image based on the detection signal, and distinguishes between a spurious signal and a signal corresponding to a presence of a foreign particle on the surface based on the first image and the adjusted spatial intensity distribution.