The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jun. 25, 2019
Applicant:
Ruhr-universität Bochum, Bochum, DE;
Inventors:
Assignee:
RUHR-UNIVERSITÄT BOCHUM, Bochum, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H05H 1/0037 (2013.01); H01J 37/32935 (2013.01); H01J 37/32972 (2013.01);
Abstract
A probe for measuring plasma parameters by means of active plasma resonance spectroscopy comprises an external coupling, a balun, an internal coupling, and a probe head. It is provided that the couplings, the balun, and the probe head are integrated in an electrically-insulating substrate cylinder, and the substrate cylinder has a layered structure made from multiple substrate layers along its rotational axis. In this way, a probe for measuring plasma parameters is provided which enables an improved measurement of the plasma parameters, wherein the plasma is influenced as little as possible during the measurement of the plasma parameters.