The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2023

Filed:

Aug. 18, 2020
Applicants:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;

Inventor:

Fei Zhou, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/8234 (2006.01); H01L 29/06 (2006.01); H01L 29/417 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66803 (2013.01); H01L 21/823412 (2013.01); H01L 21/823418 (2013.01); H01L 21/823431 (2013.01); H01L 29/0669 (2013.01); H01L 29/41791 (2013.01); H01L 29/7851 (2013.01);
Abstract

A semiconductor structure includes a substrate; and a fin structure disposed on the substrate. The fin structure includes a channel region, a source region, and a drain region. The channel region is located between the source region and the drain region. The channel region includes a first nanowire and a second nanowire above the first nanowire. The first nanowire contains first threshold-voltage adjustment ions, and the second nanowire contains second threshold-voltage adjustment ions. A first opening is formed between the first nanowire and the substrate, and between the source region and the drain region, and a second opening is formed between the first nanowire and the second nanowire, and between the source region and the drain region. The first threshold-voltage adjustment ions are different from the second threshold-voltage adjustment ions in type, concentration, or a combination thereof.


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