The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jun. 09, 2021
Rigaku Corporation, Akishima, JP;
Shinya Kikuta, Takatsuki, JP;
Makoto Doi, Takatsuki, JP;
RIGAKU CORPORATION, Tokyo, JP;
Abstract
Provided are a total reflection X-ray fluorescence spectrometer and an estimation method which are capable of easily and quickly estimating whether contamination exists on a substrate through use of a machine learning device. The total reflection X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; and a learning unit which includes an estimation unit configured to generate estimation data on an element contained in contamination on a surface of a substrate in response to input of the spectrum, and for which learning by the estimation unit has been executed based on teacher data including the spectrum for learning and data on the element contained in the contamination on the surface of the substrate which has been used to acquire the spectrum for learning and the estimation data generated when the spectrum for learning is input to the estimation unit.