The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Mar. 15, 2022
Tokyo Electron Limited, Tokyo, JP;
Horiba Stec, Co., Ltd., Kyoto, JP;
Yuichi Furuya, Yamanashi, JP;
Masayuki Tanaka, Yamanashi, JP;
Yuhei Sakaguchi, Kyoto, JP;
Masakazu Minami, Kyoto, JP;
Toru Shimizu, Kyoto, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
HORIBA STEC, CO., LTD., Kyoto, JP;
Abstract
In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filterthat is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filterthat is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculatorthat is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filterand a second absorbance measured by the light transmitted through the CO filter