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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11796460 B1

PDFFull Text
Date of Patent:
Oct. 24, 2023

Filed:

Mar. 15, 2022

Absorbance analysis apparatus for dcr gas, absorbance analysis method for dcr gas, and absorbance analysis program recording medium on which program for dcr gas is recorded

Applicants:

Tokyo Electron Limited, Tokyo, JP;

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventors:

Yuichi Furuya, Yamanashi, JP;

Masayuki Tanaka, Yamanashi, JP;

Yuhei Sakaguchi, Kyoto, JP;

Masakazu Minami, Kyoto, JP;

Toru Shimizu, Kyoto, JP;

Assignees:

TOKYO ELECTRON LIMITED, Tokyo, JP;

HORIBA STEC, CO., LTD., Kyoto, JP;

Attorney:

Greenblum & Bernstein, P.L.C.

Primary Examiner:

David P Porta

Assistant Examiner:

Casey Bryant

Int. Cl.
CPC ...
G01N 21/3518 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3518 (2013.01);
Abstract

In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filterthat is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filterthat is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculatorthat is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filterand a second absorbance measured by the light transmitted through the CO filter

Find Patent Forward Citations

Furuya, Yuichi. (2023). Absorbance analysis apparatus for dcr gas, absorbance analysis method for dcr gas, and absorbance analysis program recording medium on which program for dcr gas is recorded (U.S. Patent No. 11796460). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11796460

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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