The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2023
Filed:
Jun. 28, 2021
Osaka University, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Yusuke Mori, Osaka, JP;
Masashi Yoshimura, Osaka, JP;
Masayuki Imanishi, Osaka, JP;
Akira Kitamoto, Osaka, JP;
Junichi Takino, Osaka, JP;
Tomoaki Sumi, Osaka, JP;
Yoshio Okayama, Osaka, JP;
OSAKA UNIVERSITY, Osaka, JP;
PANASONIC HOLDINGS CORPORATION, Osaka, JP;
Abstract
A method of manufacturing a group III nitride crystal according to a first aspect includes: preparing a seed substrate; generating a group III element oxide gas; supplying the group III element oxide gas; supplying a nitrogen element-containing gas; supplying an oxidizing gas containing nitrogen element containing at least one selected from the group consisting of NO gas, NOgas, NO gas, and NOgas; and growing the group III nitride crystal on the seed substrate.