The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2023
Filed:
Feb. 08, 2022
Applicants:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Inventors:
Daehyeon Kim, Hwaseong, KR;
Junhyun Song, Seoul, KR;
Wontae Noh, Seoul, KR;
Venkateswara R. Pallem, Hockessin, DE (US);
Assignees:
L'Air Liquide, Sociéte Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris, FR;
American Air Liquide, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C07F 5/00 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02192 (2013.01); C07F 5/00 (2013.01); C23C 16/409 (2013.01); H01L 21/0228 (2013.01); H01L 21/02205 (2013.01);
Abstract
The disclosed lanthanide precursor compounds include a cyclopentadienyl ligand having at least one aliphatic group as a substituent and at least one bidentate ligand. These precursors are suitable for depositing lanthanide containing films.