The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 10, 2023

Filed:

Nov. 23, 2022
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Kyoko Okita, Itami, JP;

Takashi Sakurada, Itami, JP;

Eiryo Takasuka, Itami, JP;

Shunsaku Ueta, Itami, JP;

Sho Sasaki, Itami, JP;

Naoki Kaji, Itami, JP;

Hidehiko Mishima, Osaka, JP;

Hirokazu Eguchi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/36 (2006.01); G01N 23/207 (2018.01); C30B 29/64 (2006.01); C01B 32/956 (2017.01);
U.S. Cl.
CPC ...
C30B 29/36 (2013.01); G01N 23/207 (2013.01); C01B 32/956 (2017.08); C01P 2002/72 (2013.01); C30B 29/64 (2013.01);
Abstract

In a case where a detector is positioned in a [11-20] direction, and where a first measurement region including a center of a main surface is irradiated with an X ray in a direction within ±15° relative to a [−1-120] direction, a ratio of a maximum intensity of a first intensity profile is more than or equal to 1500. In a case where the detector is positioned in a direction parallel to a [−1100] direction, and where the first measurement region is irradiated with an X ray in a direction within ±6° relative to a [1-100] direction, a ratio of a maximum intensity of a second intensity profile is more than or equal to 1500. An absolute value of a difference between maximum value and minimum value of energy at which the first intensity profile indicates a maximum value is less than or equal to 0.06 keV.


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