Three-dimensional memory device and method for manufacturing the same

Abstract

The present disclosure provides a three-dimensional memory device and a method for manufacturing the same. The three-dimensional memory device includes a plurality of tiles, and each tiles includes a plurality of blocks, and each blocks includes a gate stacked structure, a conductive layer, first ring-shaped channel pillars, source/drain pillars, and charge storage structures. The gate stacked structure is disposed on the substrate and includes gate layers electrically insulated from each other. The conductive layer is disposed between the substrate and the gate stacked structure. The first ring-shaped channel pillars are disposed on the substrate and located in the gate stacked structure. The source/drain pillars are disposed on the substrate, and each of the first ring-shaped channel pillars are configured with two source/drain pillars disposed therein. Each of the charge storage structures is disposed between the corresponding gate layer and the corresponding first ring-shaped channel pillar. The conductive layer in one of the tiles is isolated from the conductive layers in the other tiles.