The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Mar. 08, 2016
Applicant:
Evatec Ag, Trubbach, CH;
Inventors:
Assignee:
EVATEC AG, Trubbach, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); F27D 5/00 (2006.01); F27D 9/00 (2006.01); C23C 14/58 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F27D 5/0037 (2013.01); F27D 9/00 (2013.01); H01L 21/67178 (2013.01); H01L 21/67303 (2013.01); H01L 21/67309 (2013.01); C23C 14/5806 (2013.01); F27D 2009/007 (2013.01);
Abstract
A heater and/or cooler chamber includes a heat storage block or chunk. In the block a multitude of parallel, stacked slit pockets are each dimensioned to accommodate a single plate shaped workpiece. Workpiece handling openings of the slit pockets are freed and respectively covered by a door arrangement. The slit pockets are tailored to snugly surround the plate shaped workpieces therein so as to establish an efficient heat transfer between the heat storage block or chunk and the workpieces to be cooled or heated.