The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Feb. 13, 2019
Korea Institute of Fusion Energy, Daejeon, KR;
Dong Chan Seok, Gunsan-si, KR;
Tai Hyeop Lho, Seoul, KR;
Yong Ho Jung, Gyeonggi-do, KR;
Yong Sup Choi, Gunsan-si, KR;
Kang Il Lee, Gunsan-si, KR;
Seung Ryul Yoo, Daejeon, KR;
Soo Ouk Jang, Sejong, KR;
KOREA INSTITUTE OF FUSION ENERGY, Daejeon, KR;
Abstract
A point etching module using an annular surface-discharge plasma apparatus is disclosed. The point etching module using an annular surface-discharge plasma apparatus comprises: a plate-shaped dielectric; a circular electrode disposed on and in contact with the upper surface of the dielectric; an annular electrode disposed on and in contact with the lower surface of the dielectric and providing a gas receiving space for receiving gas; and a power supplier for applying high voltage between the circular electrode and the annular electrode, wherein when the application of the high voltage starts an electric discharge, filament type plasma is irradiated toward a substrate to be treated, by using plasma flowing in the center direction of the annular electrode from between the inner surface of the annular electrode and the lower surface of the dielectric.