The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2023
Filed:
Jan. 17, 2020
Asml Netherlands B.v., Veldhoven, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Hendrik Cornelis Anton Borger, Eindhoven, NL;
Frederik Eduard De Jong, Veldhoven, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Siebe Landheer, Eindhoven, NL;
Chung-Hsun Li, Eindhoven, NL;
Patricius Jacobus Neefs, Raamsdonksveer, NL;
Georgios Tsirogiannis, Eindhoven, NL;
Si-Han Zeng, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of determining an overlay value of a substrate, the method including: obtaining temperature data that includes data on measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and determining an overlay value of the substrate in dependence on the obtained temperature data. There is further disclosed a method of determining a performance of a clamping by a substrate table using a determined overlay value.