The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2023

Filed:

Aug. 04, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chung-Nang Chen, Hsinchu County, TW;

Shing-Huang Wu, Hsinchu, TW;

Chia-Wei Liu, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0058 (2013.01); B81C 1/00333 (2013.01); B81B 2207/07 (2013.01);
Abstract

A MEMS package and a method for forming a MEMS package are provided. The MEMS package includes a package substrate, a housing structure, an image sensor structure, a MEMS structure and a composite damper. The housing structure includes a stopper. The image sensor structure and the MEMS structure are between the package substrate and the housing structure. An interconnect wire electrically connects the MEMS structure to the image sensor structure. The composite damper is between the package substrate and the housing structure. The composite damper is configured to control a gap between the interconnect wire and the stopper.


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