The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11768176 B1

Date of Patent:

Sep. 26, 2023

Filed:

Jan. 06, 2022

Ion source with gas delivery for high-fidelity analysis

Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventor:

James Edward Blessing, Morgan Hill, CA (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:

Hamilton, Brook, Smith & Reynolds, P.C.

Primary Examiner:

Kiet T Nguyen

Int. Cl.

CPC ...

G01N 27/64 (2006.01); H01J 49/14 (2006.01); H01J 49/24 (2006.01); H01J 49/42 (2006.01); G01N 33/00 (2006.01); H01J 49/00 (2006.01);

U.S. Cl.

CPC ...

G01N 27/64 (2013.01); G01N 33/0027 (2013.01); H01J 49/0031 (2013.01); H01J 49/14 (2013.01); H01J 49/147 (2013.01); H01J 49/24 (2013.01); H01J 49/42 (2013.01);

Abstract

In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

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